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Electrochemical Micromachining of Stainless Steel by Ultrashort Voltage Pulses

Summary:

Application of ultrashort voltage pulses to a tiny tool electrode under suitable electrochemical conditions enables precise three-dimensional machining of stainless steel. In order to reach submicrometer precision and high processing speed, the formation of a passive layer on the workpiece surface during the machining process has to be prevented by proper choice of the electrolyte. Mixtures of concentrated hydrofluoric and hydrochloric acid are well suited in this respect and allow the automated machining of complicated three-dimensional microelements. The dependence of the machining precision on pulse duration and pulse amplitude was investigated in detail. The progress of modern electronics technology towards smaller devices triggered the miniaturization of mechanical and optical parts and components like sensors, connectors, actuators or reactors [1–6]. Besides semiconductors, metals become increasingly important to fulfill the specifications of such applications. Molding techniques for the mass production of plastic microcomponents [7] require the fabrication of molds from hard materials, preferentially alloyed steels. However, methods which allow for the three-dimensional micromachining of metals are rather limited.

Format:
Pages :15
Size: 394 kb
Author :Laurent Cagnon , Viola Kirchner , Matthias Kock , Rolf Schuster,
Gerhard Ertl, W. Thomas Gmelin, and Heinz Kück

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